Crystal Bond 509 in Xactix (XeFe2) Etcher
PROM Request Title:
Crystal Bond 509 in Xactix (XeFe2) Etcher
PROM Date:
02/21/2014
PROM Decision:
Approved for use with gold contaminated chuck.
Link to PROM Request and supporting documentation:
Equipment List:
Xactix Xenon Difluoride Etcher (xactix)
PROM Request Summary:
Request to use Crystal Bond 509 in Xactix (XeFe2) Etcher. Crystal Bond 509 is approved for lab use but not standard for Xactix.