CLK-820
PROM Request Title:
CLK-820
PROM Date:
05/16/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
CLK-820 [1]
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
PROM Request Summary:
Request to use J.T. Baker CLK-820 photoresist stripper for Cu on an ongoing basis.