GaAs processing and citric acid introduction
PROM Request Title:
GaAs processing and citric acid introduction
PROM Date:
06/25/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
PROM Request Summary:
Request to use GaAs substrates in gold contamination level tools and to bring in citric acid.