Use of Crystalbond 555 in Lampoly
PROM Request Title:
Use of Crystalbond 555 in Lampoly
PROM Date:
07/15/2014
PROM Decision:
Conditional approval. Crystal Bond use requires additional characterization and procedure definition. Alternatives proposed.
Link to PROM Request and supporting documentation:
Equipment List:
AMAT P5000 Etcher (p5000etch)
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Request to use Crystal Bond 555 to mount chips on wafer in Lampoly etcher.