Etching FOx-22 in PT-Ox
PROM Request Title:
Etching FOx-22 in PT-Ox
PROM Date:
07/25/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
PROM Request Summary:
Request to etch FOx-22 spin on glass in PT-OX etcher.