Etching Y on MoS2 substrate at wbflexcorr
PROM Request Title:
Etching Y on MoS2 substrate at wbflexcorr
PROM Date:
10/07/2014
PROM Decision:
Approved for documented quantities. Re-approval required if quantities change.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
PROM Request Summary:
Request to etch Y at wbflexcorr.