Polyimide MLD
PROM Request Title:
Polyimide MLD
PROM Date:
10/13/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Polyimide MLD [1]
Equipment List:
Savannah ALD (savannah)
Fiji 2 ALD (fiji2)
PROM Request Summary:
Request to use MVD to develop polyimide film deposition.