Contamination Study of Semi-Clean SiGe in LAMpoly
PROM Request Title:
Contamination Study of Semi-Clean SiGe in LAMpoly
PROM Date:
02/02/2015
PROM Decision:
Approved for study. Resubmission is required after data is collected. // Update 2/18/15: TiN layer deposition at Berkeley is approved due to extended Fiji1 downtime. // Update 3/31/15: Contamination data appended. Process flow is approved.
Link to PROM Request and supporting documentation:
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
GnP POLI-400L (cmp)
AMAT P5000 Etcher (p5000etch)
Fiji 1 (fiji1)
PROM Request Summary:
Request to perform contamination study of Semi-Clean SiGe in LAMpoly.