Wafers from outside fab to process in SNF clean tools
PROM Request Title:
Wafers from outside fab to process in SNF clean tools
PROM Date:
03/19/2015
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Clean 1 (wbclean-1)
Fiji 1 ALD (fiji1)
PROM Request Summary:
Data submission as per SNF contamination policy.