Use of AZ 125nxt photoresist
PROM Request Title:
Use of AZ 125nxt photoresist
PROM Date:
03/25/2015
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Headway Manual Resist Spinner (headway2)
Karl Suss MA-6 Contact Aligner (karlsuss)
SVG Develop Track 1 (svgdev)
PROM Request Summary:
Request to use AZ 125nxt resist in headway, karl suss, and SVG dev.