Hot wet etch for SiC
PROM Request Title:
Hot wet etch for SiC
PROM Date:
06/20/2015
PROM Decision:
Request rejected due to safety concerns.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
PROM Request Summary:
Request to use hot HF:HNO3 solution to etch silicon carbide.