Post wafer dicing pieces in lampoly
PROM Request Title:
Post wafer dicing pieces in lampoly
PROM Date:
08/13/2015
PROM Decision:
Request approved only when resist is present during dicing to prevent massive amounts of particles.
Link to PROM Request and supporting documentation:
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Request to take pieces post wafer dicing (gold) into lampoly (clean).