Toray Light Shielding Material for Lithography
PROM Request Title:
Toray Light Shielding Material for Lithography
PROM Date:
09/23/2015
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Headway Manual Resist Spinner (headway2)
Karl Suss MA-6 Contact Aligner (karlsuss)
Oven (White) (white-oven)
PROM Request Summary:
Use of TABK-5000 and storage of chemical for 2 weeks.