Etching of contaminated wafer pieces in Lampoly
PROM Request Title:
Etching of contaminated wafer pieces in Lampoly
PROM Date:
09/30/2015
PROM Decision:
Request approved with ICPMS contamination collection.
Link to PROM Request and supporting documentation:
Equipment List:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Request to use Lampoly to etch straight profiles into contaminated wafer pieces.