XeF2 etching of Si pillars implanted in retina fixed in resin
PROM Request Title:
XeF2 etching of Si pillars implanted in retina fixed in resin
PROM Date:
03/14/2016
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Xactix Xenon Difluoride Etcher (xactix)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
PROM Request Summary:
Request to use XeF2 etcher to etch rat retina embedded with Si.