Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Use of Cr(OH)3 in SNF

Use of Cr(OH)3 in SNF

PROM Request Title: 
Use of Cr(OH)3 in SNF
PROM Date: 
09/02/2016
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
Use of Cr(OH)3 in SNF [1]
Non-Drupalized Equipment List: 
Laurell-G
Equipment List: 
SVG Resist Coat Track 1 (svgcoat)
Karl Suss MA-6 Contact Aligner 1 (karlsuss)
SVG Develop Track 1 (svgdev)
PROM Request Summary: 
Use of Cr(OH)3 slurry in Laurell-G.
Source URL (modified on 23 May 2022 - 5:46 pm): https://snfexfab.stanford.edu/snf/prom-requests/use-of-croh3-in-snf#comment-0

Links
[1] https://www.google.com/url?q=https%3A//docs.google.com/document/d/e/2PACX-1vQKu4SE2YyIi3eXAPxWvOjP2yGezRpr23XFCN4lF04MNXMoJUwz-DhTIzrDJ9EEjfLW5KNvnU_WKotp/pub&sa=D&source=editors&ust=1653356799138053&usg=AOvVaw2n_xffRsdkQSj-JvvytZk7