Use of Cr(OH)3 in SNF
PROM Request Title:
Use of Cr(OH)3 in SNF
PROM Date:
09/02/2016
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Non-Drupalized Equipment List:
Laurell-G
Equipment List:
SVG Resist Coat Track 1 (svgcoat)
Karl Suss MA-6 Contact Aligner 1 (karlsuss)
SVG Develop Track 1 (svgdev)
PROM Request Summary:
Use of Cr(OH)3 slurry in Laurell-G.