Classifying Fiji1 as a clean tool
PROM Request Title:
Classifying Fiji1 as a clean tool
PROM Date:
12/14/2016
PROM Decision:
Data collection approved. Results demonstrated that procedure is not sufficient to remove contamination risk.
Link to PROM Request and supporting documentation:
Equipment List:
AMAT Centurion Epitaxial System (epi2)
SPTS uetch vapor etch (uetch)
Fiji 1 ALD (fiji1)
PROM Request Summary:
Procedure proposed to allow Fiji1 to be used as a clean tool. Data collection required. Collected data showed this procedure is not sufficient to remove contamination risk to epi.