HBr/Cl2 etching AlN in the Lampoly
PROM Request Title:
HBr/Cl2 etching AlN in the Lampoly
PROM Date:
06/26/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Non-standard contamination level etching in Lampoly.