Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Characterization of EV Spraycoater; Conformal Coating in deep Trenches
Areas of Interest: 
Spray coating of resist in 30-50um deep Si trenchs
Researchers and (Mentors): 
Ehsan Sadeghipour, (Mahnaz Mansourpour), (Jason Parker)
Date: 
March 2011
Project Type: 
E241 [1]
Report: 
Characterization of EV Spraycoater: Conformal Coating in Deep Trenches- Final Report
Presentation: 
Characterization of EV Spraycoater: Conformal Coating in Deep Trenches- Final Presentation
Processing Technique (former Function and Method): 
Resist coat [2]
Source URL (modified on 8 Sep 2020 - 11:04 pm): https://snfexfab.stanford.edu/snf/projects/characterization-of-ev-spraycoater-conformal-coating-in-deep-trenches#comment-0

Links
[1] https://snfexfab.stanford.edu/snf/project-type/e241
[2] https://snfexfab.stanford.edu/guide/equipment/processing-technique/optical-photolithography/resist-coat