Links
[1] https://www.google.com/url?q=https%3A//drive.google.com/open%3Fid%3D1zVrGdvGDgnjdxhJXyGfITxspkz6WCzoI&sa=D&ust=1568552691753000&usg=AFQjCNHLOZkwc9daqKvYfGHDBGf3ifI8mA
[2] https://snfguide.stanford.edu/snf/project-type/e241
[3] https://snfguide.stanford.edu/guide/equipment/purpose/deposition/atomic-layer-deposition-ald