Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > ALD Precursor Delivery & Debugging: A Case Study in Polymer Development
Areas of Interest: 
PMDA, ODA
Researchers and (Mentors): 
Felix Alfonso, Tim English, (Michelle Rincon), (J Provine)
Date: 
December 2014
Project Type: 
E241 [1]
Report: 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
Presentation: 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Presentation
Function and Method: 
Atomic Layer Deposition (ALD) [2]
Source URL (modified on 8 Sep 2020 - 11:04 pm): https://snfexfab.stanford.edu/snf/projects/ald-precursor-delivery-debugging-case-study-in-polymer-development#comment-0

Links
[1] https://snfexfab.stanford.edu/snf/project-type/e241
[2] https://snfexfab.stanford.edu/guide/equipment/purpose/deposition/atomic-layer-deposition-ald