Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Vapor Phase Doping of Boron in Silicon
Areas of Interest: 
Alternative to implantation for boron doping of silicon using Epi
Researchers and (Mentors): 
Kai Zang, (Maurice Stevens), (Ted Kamins)
Imported Report (on Google Drive): 
click here [1]
Imported Presentation: 
click here [2]
Date: 
June 2015
Project Type: 
E241 [3]
Report: 
Vapor Phase Doping of Boron in Silicon- Final Report
Presentation: 
Vapor Phase Doping of Boron in Silicon- Final Presentation
Function and Method: 
Doping [4]
Source URL (modified on 8 Sep 2020 - 11:04 pm): https://snfexfab.stanford.edu/snf/projects/vapor-phase-doping-of-boron-in-silicon#comment-0

Links
[1] https://www.google.com/url?q=https%3A//drive.google.com/open%3Fid%3D1mpZIWeY_S2Bq6jsqiYFfp753M-8qYWTv&sa=D&ust=1568552691744000&usg=AFQjCNG1bN9tQa761r8tByIhdqT8UwTRMw
[2] https://www.google.com/url?q=https%3A//drive.google.com/open%3Fid%3D1WKHzTI8omXKalqjjedINBG0FnfyI48VH&sa=D&ust=1568552691744000&usg=AFQjCNEybr11ByybKLQwJq1zS9MSup0t-w
[3] https://snfexfab.stanford.edu/snf/project-type/e241
[4] https://snfexfab.stanford.edu/guide/equipment/purpose/doping