Links
[1] https://www.google.com/url?q=https%3A//drive.google.com/open%3Fid%3D15N00c33h3roH4xEl54Hpyb4bM2H01bxU&sa=D&ust=1568552691743000&usg=AFQjCNEfqzSbYRTIe5dd0m7_iK3s_AuzUQ
[2] https://www.google.com/url?q=https%3A//drive.google.com/open%3Fid%3D1QVGz1I2gdCdhg2c83m7EgGSS10GsQWZQ&sa=D&ust=1568552691743000&usg=AFQjCNGVogC1WqpqKdRG1D6PQWUd3yvCVg
[3] https://snfguide.stanford.edu/snf/project-type/e241
[4] https://snfguide.stanford.edu/guide/equipment/purpose/deposition/atomic-layer-deposition-ald