Links[1] https://snfguide.stanford.edu/snf/project-type/e241 [2] https://snfguide.stanford.edu/guide/equipment/purpose/etching/dry-etching/capacitively-coupled-plasma-etching-ccp/reactive-ion-etching-rie [3] https://snfguide.stanford.edu/guide/equipment/purpose/machining/wafer-saw