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> Etch Rates of (Metal Oxide) ALD Films
Areas of Interest:
ALD film etch rates in wet chemicals
Researchers and (Mentors):
Martin Winterkorn, Karen Kim, (Michelle Rincon), (J Provine)
Date:
June 2018
Project Type:
E241
[1]
Source URL (modified on 10 Aug 2023 - 11:24 am):
https://snfguide.stanford.edu/guide/projects/etch-rates-of-metal-oxide-ald-films#comment-0
Links
[1] https://snfguide.stanford.edu/snf/project-type/e241