Please be aware that the RTAs are less than 6' away from the Savannah during loading and unloading. Please make sure to check for RTA reservations and work out the timing details with other users to maintain social distancing.
Savannah is a thermal atomic layer deposition (ALD) system. It is a Savannah S200 from Cambridge Nanotech and is categorized in the flexible cleanliness category. There is a policy in place to allow semiclean processing on Savannah with additional precautions. The system can accommodate pieces up to an 8" wafer.
Cleanliness:
Flexible
Lab Facility:
SNF Cleanroom
Training Charges:
3.00 hours
Primary Trainer:
Graham Ewing
Primary Maintenance:
Jim Haydon
Backup Maintenance:
Graham Ewing
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- Savannah In-depth
- Shadow labmembers who are using the Savannah. Make sure to ask a lot of questions during the shadowing session so you become comfortable with the tool and the procedures the SNF uses.
- When you are ready to run the tool on your own, please contactto schedule a written quiz.Graham Ewing
- After you have successfully completed the written quiz, you can schedule the practical in-lab hands on final training session with Michelle.
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Chemical Vapor Deposition
Badger ID:
savannah
1.0
Å
50.0
nm
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
8 inch wafer
(N2)
AZO (AlxZnyOx)
Alumina (Al2O3)
Dielectrics (Various Dielectrics)
Gallium Oxide (Ga2O3)
Hafnia (HfO2)
Metal oxides
Tin Oxide (SnO2)
Titania (TiO2)
Zinc Oxide (ZnO3)
Zirconia (ZrO2)
Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Silicon Carbide
Gallium Nitride
III-V
Polymer
Carbon Polymer Based
Lithium Niobate
Other (ProMCom approval required)