
Please be aware that the RTAs are less than 6' away from the Savannah during loading and unloading. Please make sure to check for RTA reservations and work out the timing details with other users to maintain social distancing.
Savannah is a thermal atomic layer deposition (ALD) system. It is a Savannah S200 from Cambridge Nanotech and is categorized in the flexible cleanliness category. There is a policy in place to allow semiclean processing on Savannah with additional precautions. The system can accommodate pieces up to an 8" wafer.