CVD-Graphene The Aixtron Black Magic CVD furnace is dedicated to graphene synthesis and can accommodate multiple pieces or a single 4" wafer, with methane and hydrogen available as process gases. Process recipes have been optimized and are available to the user for the following: Cu foil (available from SNF stockroom or provided by the user), Cu-coated substrates, and Ni substrates. The recipes on Cu have been characterized to give excellent monolayer coverage with minimal areas of bilayers and low defectivity. Ni substrates will give multi-monolayer growth.
Cleanliness:
Flexible
Lab Facility:
SNF Exfab
Training Charges:
1.00 hours
Primary Trainer:
Swaroop Kommera
Backup Trainer(s):
Maurice Stevens
Primary Maintenance:
Jim Haydon
Backup Maintenance:
Mario Vilanova
Steps to become a tool user
-
Become a member of SNF.
- Read the relevant operating procedures:
- aixtron-graphene
- Contact the primary trainer:for training schedule.Swaroop Kommera
Location:
SNF Exfab Paul G Allen L119 Año Nuevo
Badger Area:
nSiL: Cleanroom
Badger ID:
aixtron-graphene
Å
nm
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
(78% N2, 21% O2, ~1% Ar)
(H2)
(CH4)
Maximum Load:
1x4" wafer or Copper/Nickel foil
Graphene (C)
Silicon
Other (ProMCom approval required)