InAs Heterostructure in Savannah
PROM Request Title:
InAs Heterostructure in Savannah
PROM Date:
03/26/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Savannah ALD (savannah)
PROM Request Summary:
Calculations performed to demonstrate no risk of As exposure in un-loadlocked Savannah system.