Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3
PROM Request Title:
Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3
PROM Date:
05/17/2021
PROM Decision:
Request approved. Please see process staff for details.
Equipment List:
Savannah ALD (savannah)
PROM Request Summary:
Request for non-standard materials in Savannah.
Materials All: