Main Content:
SNF Plasma Therm Recipe Setup
Video describing recipe set up for Plasma Therm Etch tools. PT-DSE has additional options, HDPCVD is similar to this video.
Video link: https://youtu.be/X8NKFJLHIas [1]
Video describing recipe set up for Plasma Therm Etch tools. PT-DSE has additional options, HDPCVD is similar to this video.