Block copolymer etch in lampoly
PROM Request Title:
Block copolymer etch in lampoly
PROM Date:
04/07/2021
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Non-standard material etch in clean tool in SNF
Materials All:
Polymer [2]