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SOP for plasma activated direct bonding with the Flipchip tool

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PDF icon SOP for plasma activated direct bonding with the Flipchip tool [1]
Source URL (modified on 10 Aug 2023 - 11:37 am): https://snfexfab.stanford.edu/guide/docs/nano-nugget/sop-for-plasma-activated-direct-bonding-with-flipchip-tool

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[1] https://snfexfab.stanford.edu/sites/snfexfab/files/sections/diplayfiles/e241_sop_plasma_activated_bonding_flipchip_sd_bo.pdf