Spincoating and dry etching of PEDOT-PSS
PROM Request Title:
Spincoating and dry etching of PEDOT-PSS
PROM Date:
11/18/2020
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Headway Manual Resist Spinner (headway2)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Wet Bench Miscellaneous (wbmiscres)
PROM Request Summary:
Request to bring in liquid form PEDOT-PSS to spin coat and etch in SNF