Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Thick ALD Titania in Savannah

Thick ALD Titania in Savannah

PROM Request Title: 
Thick ALD Titania in Savannah
PROM Date: 
03/12/2020
PROM Decision: 
Approved.
Equipment List: 
Savannah (savannah)
PROM Request Summary: 

Request to deposit thicker than maximum allowed TiO2 layer

Source URL (modified on 1 Apr 2021 - 11:57 am): https://snfexfab.stanford.edu/snf/prom-requests/thick-ald-titania-in-savannah