Bring in, store, and process Si wafers from Rogue Valley Microdevices
PROM Request Title:
Bring in, store, and process Si wafers from Rogue Valley Microdevices
PROM Date:
02/05/2020
PROM Decision:
Requestor developed process flow with no clean equipment required so PROM approval not needed. Requst is archived for future reference.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
HMDS Vapor Prime Oven, YES (yes)
SVG Develop Track 1 (svgdev)
SVG Resist Coat Track 1 (svgcoat)
Karl Suss MA-6 Contact Aligner (karlsuss)
Heidelberg MLA 150 (heidelberg)
AJA Evaporator (aja-evap)
Oxford Dielectric Etcher (oxford-rie)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
PROM Request Summary:
Request to bring in wafers from a new vendor.