20200207 A. Piazza- HFE7100 for use in wbflex-solv
PROM Request Title:
20200207 A. Piazza- HFE7100 for use in wbflex-solv
PROM Date:
02/07/2020
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
PROM Request Summary:
Request to bring in new chemistry for use with nanoscribe resists