AlCuZr target for Lesker
PROM Request Title:
AlCuZr target for Lesker
PROM Date:
01/07/2020
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Lesker Sputter (lesker-sputter)
PROM Request Summary:
Request to bring new target in to use in Lesker.