Use of InP substrate in Fiji1
PROM Request Title:
Use of InP substrate in Fiji1
PROM Date:
11/15/2019
PROM Decision:
Request approved. Please see process staff for details.
Equipment List:
Fiji 1 ALD (fiji1)
PROM Request Summary:
Request documenting procedures to use InP substrate in Fiji1 (semiclean)