Links
[1] https://snfguide.stanford.edu/snf/project-type/e241
[2] https://snfguide.stanford.edu/guide/equipment/purpose/deposition/atomic-layer-deposition-ald/thermal-ald
[3] https://snfguide.stanford.edu/guide/materials/aluminum-oxide
[4] https://snfguide.stanford.edu/guide/materials/hafnium-dioxide