Introduction of EBR PG Wash Bottle for litho solvent bench
PROM Request Title:
Introduction of EBR PG Wash Bottle for litho solvent bench
PROM Date:
08/20/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Laurell Manual Resist Spinner (laurell-R)
Wet Bench Solvent Lithography (lithosolv)
Headway Manual Resist Spinner (headway2)
PROM Request Summary:
Documenting new chemistry that will be stocked by SNF.