Request to use KMPR 1025 resist on Heidelberg
PROM Request Title:
Request to use KMPR 1025 resist on Heidelberg
PROM Date:
10/09/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Heidelberg MLA 150 - 2 (heidelberg2)
Headway Manual Resist Spinner (headway2)
SVG Resist Coat Track 1 (svgcoat)
SVG Develop Track 1 (svgdev)
PROM Request Summary:
Detailed procedure identified to allow KMPR 1025 resist on the Heidelberg.