Microfabrication Materials Request for Mesh Electronics
PROM Request Title:
Microfabrication Materials Request for Mesh Electronics
PROM Date:
07/31/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Headway Manual Resist Spinner (headway2)
Heidelberg MLA 150 (heidelberg)
Karl Suss MA-6 Contact Aligner (karlsuss)
Wet Bench Solvent Lithography (lithosolv)
PROM Request Summary:
Move SU-8 Process from SNSF to SNF equipment.