Published on Stanford Nanofabrication Facility (https://snfexfab.stanford.edu)

Home > Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures- Final Report
Main Content: 

Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures- Final Report

PDF File: 
PDF icon Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures- Final Report [1]
Source URL (modified on 14 Apr 2021 - 3:17 pm): https://snfexfab.stanford.edu/docs/report/characterization-of-fiji-ald-film-quality-and-conformality-in-high-aspect-ratiodeep-etched#comment-0

Links
[1] https://snfexfab.stanford.edu/sites/g/files/sbiybj8726/f/sections/diplayfiles/ee412_final_report-ald_conformality_final.pdf