EIM-TFSI/p(VDF-HFP) Ion gel processing
PROM Request Title:
EIM-TFSI/p(VDF-HFP) Ion gel processing
PROM Date:
04/11/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
AJA Evaporator (aja-evap)
SVG Resist Coat Track 1 (svgcoat)
Heidelberg MLA 150 (heidelberg)
SVG Develop Track 1 (svgdev)
MRC Reactive Ion Etcher (mrc)
Matrix Plasma Resist Strip (matrix)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
PROM Request Summary:
Introduction of new gel material (made elsewhere) into SNF process equipment for patterning and deposition.