Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates
PROM Request Title:
Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates
PROM Date:
04/28/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
PROM Request Summary:
Request for processing of metal containing wafers on semiclean lampoly tool.