Adhesion Promoter for Nanoscribe IP Resists
PROM Request Title:
Adhesion Promoter for Nanoscribe IP Resists
PROM Date:
03/13/2019
PROM Decision:
Request approved. Please see process staff for details.
Equipment List:
Nanoscribe Photonics GT (nanoscribe)
Wet Bench Flexcorr 3 (wbflexcorr-3)
PROM Request Summary:
Request to bring 3-(Trimethoxysilyl)propyl methacrylate in as adhesion promoter for Nanoscribe.