ZnO film development using DMZ and Ozone on MVD
PROM Request Title:
ZnO film development using DMZ and Ozone on MVD
PROM Date:
04/01/2019
PROM Decision:
Request approved. Please see process staff for details.
Equipment List:
MVD (mvd)
Savannah ALD (savannah)
PROM Request Summary:
Request to use new DMZ precursor on the MVD with Ozone for ZnO film development.