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Tungsten

Chemical Formula:

W

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
AJA2 Evaporator aja2-evap	Semiclean	SNF Cleanroom Paul G Allen L107	0.00 - 300.00 nm	Ag Al Co Cr Ge Hf Mo Nb Pd Pt Si Ta Ti V W Zr
Innotec Evaporator Innotec	Flexible	SNF Cleanroom Paul G Allen L107		Ag Al Au Co Cr Cu Fe Ge In Mo Ni Pd Si Ta Ti W
Intlvac Evaporation Intlvac_evap	Clean Semiclean	SNF Cleanroom Paul G Allen L107	0.00 - 0.50 μm	Al Co Cr Ge Hf Mo Nb Ni Pd Si Ta Ti V W Zr
Lesker Sputter lesker-sputter	Flexible	SNF Exfab Paul G Allen 155A Venice		Ag Al Al₂O₃ AlSi Au Co Cr Cu Fe In_xSn_yO_z Nb Ni Pd Si SiO₂ Ta Ti TiN W
Lesker2 Sputter lesker2-sputter	Semiclean	SNF Cleanroom Paul G Allen L107	1.00 μm	Ag Al Al₂O₃ AlSi Cr Ge In_xSn_yO_z Mo Pd Ru Sc Si SiO₂ Sn Ta Ti TiN W

Etching Equipment

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched
AMAT P5000 Etcher p5000etch	Clean Clean (Ge) Semiclean	SNF Cleanroom Paul G Allen L107	Si Si3N4 SiGe SiO₂ SiON	C C C dimethylpolysiloxane poly(p-xylylene) SiC Ti Various C-based W WSi₂ PI Resist Ti Tungsten
Wet Bench CMOS Metal wbclean3	Semiclean	SNF Cleanroom Paul G Allen L107	Al Ti W
Wet Bench Flexcorr 1 wbflexcorr-1	Flexible	SNF Cleanroom Paul G Allen L107	Metals Al Au Cr Si SiO₂ Resist	GaAs Si3N4 Ti W