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New Litho Tool Map

We rearranged the furniture while you were out.

The main changes are discussed below and following is a list of operator stations, meaning locations that provide a 6’ distance from other positions, in an effort to provide our lab members a safe environment to work in. To minimize the need to navigate between the lithography area and the service area we have also added chemical cabinets to support processes in lithography. It is the intent to support all existing processes and maximize the distance between individuals in the facility. As this is a work in progress feel free to offer suggestions as we move forward this summer

Main points:

  • Equipment moved or relocated to operator stations
  • Singe oven removed – singe process transferred to YES oven
  • Equipment groups defined for tools that necessitate less than 6’ distancing
  • Labmember storage bins relocated
  • New “point of use” chemical cabinets

 

Operational changes

For equipment and work spaces that are needed in conjunction; spinners and solvent benches, EV align and EV bonder we limit operation to one individual at a time. When possible equipment has been moved to reduce the disruption necessitated by social distancing

Affected equipment

  • Ebeam bench : Laurell R
  • Headway 2 : manual develop (wbmiscres)
  • EV align : EV bonder
  • EV spray coater : SVGcoat3&4
  • Nikon inspection microscope: Tencor FLexus
  • Olympus inspection microscope: EV align(SLAC)

 

Changes to maintain existing processes

YES oven – supports HMDS vapor prime and singe bake

  • Recipe #1 - standard HMDS vapor prime
  • Recipe #5 – vacuum singe bake – dehydration only, no HMDS

 

SVG coat track  - separated track computers to either end of the coater to allow simultaneous usage

  • SVGcoat2(back track) computer on left side of the track
  • SVGcoat(front track) computer on right side of track
Last modified: 8 Jun 2020