Request to deposit 75nm of Al2O3 on Savannah
PROM Request Title:
Request to deposit 75nm of Al2O3 on Savannah
PROM Request Summary:
Request to exceed 50nm limit for deposition on Savannah.
PROM Date:
07/23/2015
PROM Decision:
Requestor decided more cost effective process was to send out for deposition at LGA films.
Link to PROM Request and supporting documentation:
Equipment List:
